Operator, Engineer & Service modes with password protection
Control multiple axes of Motion.
Integrated machine vision for Automatic alignment, and process verification.
Integrated multi channel Beam analyser & Energy monitor
Auto focusing and wafer height mapping
PLC & Network IO connectivity
Control software is written to a customers specification using an Active X library and proven components from major vendors such as National Instruments and Matrox. It integrates Motion control with RS beam analysers, Energy monitors, Auto focus and Vision systems to form a complete state of the art control solution.
Typical applications include Semiconductor processing, Flat panel display patterning and Micro Lithography. A typical program would include an initialisation screen, a wafer load/unload screen, a set process parameters screen, a process screen and a manual systecontrol screen. As part of the design a process a simulated application is written that allows clients to walk through the software and implement design changes before deployment on the real system hardware.